JPH0247652U - - Google Patents
Info
- Publication number
- JPH0247652U JPH0247652U JP12587188U JP12587188U JPH0247652U JP H0247652 U JPH0247652 U JP H0247652U JP 12587188 U JP12587188 U JP 12587188U JP 12587188 U JP12587188 U JP 12587188U JP H0247652 U JPH0247652 U JP H0247652U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- rotation
- spin chuck
- vibration
- speed rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587188U JPH0247652U (en]) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587188U JPH0247652U (en]) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247652U true JPH0247652U (en]) | 1990-03-30 |
Family
ID=31376860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12587188U Pending JPH0247652U (en]) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247652U (en]) |
-
1988
- 1988-09-26 JP JP12587188U patent/JPH0247652U/ja active Pending
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